06EE762 - Micro Electro Mechanical Systems (2006 - 2007) |
PART – A |
UNIT – I |
INTRODUCTION TO MEMS TECHNOLOGY: Introduction to MEMS
and motivation, Basic definitions, history of
SCALING IN MICRODOMAIN: How small is different- some natural
examples, Scaling laws in electrostatic, electromagnetic, rigidity of structures,
heating & cooling, Fluid viscosity and fluid interfaces, etc. Scaling in overall
system performance considering multiple physical domains |
UNIT – II |
MEMS MATERIALS: Mechanical and other properties of materials used in
MEMS
MICROFABRICATION / MICROMACHINING: Overview of
microfabrication, Review of microelectronics fabrication processes like
photolithography, deposition, doping, etching, structural and sacrificial
materials, other lithography methods,. MEMS fabrication methods like
surface, bulk, LIGA and wafer bonding methods. |
UNIT – III and IV |
TRANSDUCTION PRINCIPLES: Transduction principles in microdomain
MEMS MODELING: Basic modeling elements in electrical, mechanical,
thermal and fluid systems, analogy between 2nd order mechanical and
electrical systems. Modeling elastic, electrostatic, electromagnetic systems. |
PART – B |
UNIT – V |
RADIO FREQUENCY (RF) MEMS: Introduction, Review of RF-based
communication systems, RF –MEMS like MEMS inductors, varactors, tuners,
filters, resonators, phase shifters, switches |
UNIT – VI |
OPTICAL MEMS: Preview, passive optical components like lenses and
mirrors, actuators for active optical MEMS. |
UNIT – VII and VIII |
CASE STUDIES: Case studies of microsystems including microcantilever
based sensors and actuators with appropriate selection of material properties:
thermal; mechanical properties. Static and dynamic mechanical response with
different force mechanisms: electrostatic, electromagnetic, thermal etc.
Tutorials: The above case study examples are to be implemented in either
CoventorWare or ANSYS Multiphysics.
NANOTECHNOLOGY AND MEMS: Relation between micro and
nanotechnologies. Need and issues in handling nano products with the help of
MEMS
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REFERENCE |
Reference Books |
1. “MEMS and Microsystems Design and Manufacture”-Tai, Ran
Hsu, TMH, 2002, ISBN 0-07-239391-2.
2. “Foundations of MEMS”- Chang Liu, Pearson International
Edition, 2006, ISBN 0-13-199204-X.
3. “Modeling MEMS and NEMS”- John A. Pelesko, David H.
Bernstein, Chapman & Hall/CRC, 2003, ISBN 1-58488-306-5.
4. “MEMS”-Nitaigour Premchand Mahalik, TMH, 2007, ISBN
13:978-0-07-063445-9.
5. “The Science and Engineering of Microelectronic Fabrication”-
Second Edition, Campbell, Oxford, 2001, ISBN 0-19-513605-5.
(General Microfabrication Reference.).
6. “Fundamentals of Microfabrication” - Madou, CRC Press, 1997,
ISBN 0-8493-9451-1. (Microfabrication for MEMS + some
information on materials and devices.)
7. “Micromachined Transducers Sourcebook”-Kovacs, McGraw-
Hill, 1998, ISBN 0-07-290722-3. (General MEMS reference with an
emphasis on a very large number of transduction methods.)
8. “An Introduction to Microelectromechanical Systems
Engineering”- Nadim Maluf, Artech House, 2000
9. “Introduction to Microelectromechanical “(MEM) Microwave
Systems H.J. De Los Santos, Artech, 1999.
4. “Smart Sensors and MEMS”- Edtd. By Sergey Y. Yurish, Maria
Teresa, S R Gomes, Nato Science Series-Kluwer Academic
Publishers, London, 20.
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